import sys input = sys.stdin.readline MAX = 10**5+100 MOD = 10**9+7 fact = [0]*MAX #fact[i]: i! inv = [0]*MAX #inv[i]: iの逆元 finv = [0]*MAX #finv[i]: i!の逆元 fact[0] = 1 fact[1] = 1 finv[0] = 1 finv[1] = 1 inv[1] = 1 for i in range(2, MAX): fact[i] = fact[i-1]*i%MOD inv[i] = MOD-inv[MOD%i]*(MOD//i)%MOD finv[i] = finv[i-1]*inv[i]%MOD def C(n, r): if n>j)&1==1: if (B[i]>>j)&1==0: print(0) exit() else: already += 1 else: if (B[i]>>j)&1==1: new += 1 mul = 0 for j in range(cnt+1): if j%2==0: mul += C(cnt, j)*pow(pow(2, cnt-j, MOD)-1, new, MOD)%MOD*pow(pow(2, already, MOD), cnt-j, MOD) mul %= MOD else: mul -= C(cnt, j)*pow(pow(2, cnt-j, MOD)-1, new, MOD)%MOD*pow(pow(2, already, MOD), cnt-j, MOD) mul %= MOD ans = (ans*mul)%MOD pre = B[i] cnt = 0 print(ans)